Development of novel integrated bio/chemical sensor systems using chalcogenide glass materials
نویسندگان
چکیده
This paper reviews ongoing progress in the design and fabrication of new, on-chip, low loss planar molecular sensors. We report the details of device design, material selection and manufacturing processes used to realise high-index-contrast (HIC), compact micro-disk resonators. These structures have been fabricated in thermally evaporated Asand Ge-based chalcogenide glass films with PDMS (polydimethylsiloxane) micro-fluidic channels using standard UV lithography. Discussed are findings that demonstrate that our novel chalcogenide-based micro-fluidic device can be used as highly sensitive refractive index sensors.
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